Hariharan, R. and Raja, R. and Golden Renjith Nimal, R. J. and Refaai, Mohamad Reda A. and Ravi, S and Allasi, Haiter Lenin and Ganeshan, P (2021) Characterization of TiZrN and TaZrN Nanocomposite Multilayer Coating Deposited via RF/DC Magnetron Sputtering on AISI4140 Steel. Advances in Materials Science and Engineering, 2021. pp. 1-10. ISSN 1687-8434
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Abstract
In this present research work, TiZrN and TaZrN multilayer coating was deposited on 4140 steel by RF/DC magnetron sputtering for comparative work also prepared in single layer. The flow rate ratio of Ar/N2 was set to 15 : 3 sccm and the thin film was prepared by the PVD (physical vapor deposition) method by RF/DC magnetron using a Ti-Zr and Ta-Zr target with a purity of 99.99%. The crystal structure, surface morphology microstructure, and component arrangements were explored by X-ray diffraction (XRD), scanning electron microscope (SEM), and atomic force microscopy (AFM). It has been found that the crystal structure, surface morphology, microstructure, and elemental composition of the membrane are strongly dependent on deposition parameters. It is mechanically characterized by corrosion and Vickers hardness. In AFM measurements, coarse cluster particles with increasing Ti and Ta values not only increase the average roughness (Ra) by 2.341 nm (200°C) and 2.951 nm (400°C) but also have a continuous average thickness which was shown to increase by 1.504 nm and 781.75 nm. With the increase of hardness, the roughness decreases correspondingly. The TiZrN multilayer microhardness augmented to 314 GPa at 200°C and 371 GPa for TaZrN (400°C).
Item Type: | Article |
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Subjects: | Euro Archives > Engineering |
Depositing User: | Managing Editor |
Date Deposited: | 04 Feb 2023 04:16 |
Last Modified: | 21 Sep 2023 12:59 |
URI: | http://publish7promo.com/id/eprint/484 |