Items where Author is "Kühnel, M"

Manske, E and Fröhlich, T and Füßl, R and Ortlepp, I and Mastylo, R and Blumröder, U and Dontsov, D and Kühnel, M and Köchert, P (2020) Progress of nanopositioning and nanomeasuring machines for cross-scale measurement with sub-nanometre precision. Measurement Science and Technology, 31 (8). 085005. ISSN 0957-0233